Spectroscopic Ellipsometry

Spectroscopic Ellipsometry



The M-88 spectroscopic ellipsometer (J.A. Woollam Co. Inc.) with rotating analyzer was mounted on the chamber of Heavy Ion Cascade Implanter.

The vacuum chamber is equipped with higy-quality entrance and exit windows to minimize deviation caused by birefringency. Angle of incidence is 75 degrees.



The main parameters of the spectroscopic ellipsometer





Type W88
Manufacturer J.A.Woollam Co.
Wavelength 280-760 nm
Mode rotating-analyzer
Measurement time request
The ellipsometer is beeing adapted to the target chamber of Heavy Ion Cascade Implanter. During this installation procedure, unfortunately, we are not able to accept any measurement requests.
AttachmentSize
IMG_2152.JPG2.4 MB