Szilágyi, Edit

    Szilágyi, Edit, D.Sc.
    Head of the department
    Head of the Ion Beam Physics Group
    Scientific advisor
    E-mail: szilagyi (at)
    Phone: +36 1 392 2222 ext.: 3962
    Fax:     +36 1 395 9151

Recent work of E. Szilágyi includes nuclear analysis using MeV energy ion beams (RBS - Rutherford Backscattering Spectrometry, ERDA - Elastic Recoil Detection Analysis, NRA - Nuclear Reaction Analysis, channeling). She developed a computer code to calculate the depth resolution of the above ion beam techniques.

She has been extensively dealing with ion implantation and with fundamental processes of ion implantation in porous silicon, metals and semiconductors. Her main scientific interests are thin films and multilayers.

She took part in the studies on the oxidation mechanisms of silicon carbide investigated by isotope tracing method.

Education, degrees and positions

    1982-1987Lajos Kossuth University, Debrecen, Hungary
    1987-1992postgraduate fellowship, MTA KFKI Research Institute for Particle and Nuclear Physics
    1990Doctor Univ., Lajos Kossuth University, Debrecen, Hungary
    1990-1991post doctoral fellowship, University Paris VII/VI.
    1992-1994research fellow, MTA KFKI Research Institute for Particle and Nuclear Physics
    1994Candidate of Physics, Hungarian Academy of Sciences (equvivalent degree to Ph.D.)
    1994-2011senior research fellow, MTA KFKI Research Institute for Particle and Nuclear Physics
    2000-2003Bolyai János Fellowship, Hungarian Academy of Sciences
    2011Doctor of the Hungarian Academy of Sciences
    2011-scientific advisor at MTA KFKI Research Institute for Particle and Nuclear Physics

Role in scientific community

    1992-1993 Organising Committee of IBA-11 (11th Int. Conf. on Ion Beam Analysis, 5-9 July, 1993, Balatonfüred), member
    1993- Böhmische Physical Society, member
    1993-Editor of Ion Beam Information System
    1999-2002 International Organising Committee of EPS-12, General Conference of the European Physical Society, Budapest, 26-30 August 2002, Secretary
    2007- International Committee of the Conference series of Ion Beam Analysis, member
    2008- Hungarian Ion-beam Physics Platform, Steering Committee, member
    2011- MTA KFKI Research Institute for Particle and Nuclear Physics, Scientific Council, member

Research Topics
The subject of my activities may be divided in two categories:
In the field of IBA methodology:
  • measuring missing non-Rutherford cross sections for ERDA using 4He beam;
  • predicting the energy and depth resolution of the various IBA methods with reasonable precision;
  • treating the case of overlapping peaks that arise from particles of different type in complex NRA energy spectra;
  • widening the range of present computer programs used in data reduction, especially by taking into account the effects of angular multiple scattering of the probing beam particles;
  • including energy spread effects in spectrum simulation.

In the field of solid state physics and material science:

  • studying heterogeneous materials, e.g., porous silicon, multilayers, etc.
  • Applying IBA to these problems taking into account the special effects showing up in porous media.
  • Studying the effects of ion implantation in porous silicon: structural changes and physical properties.
  • Modification of the properties of the surface by ion implantation, fundamental processes of ion implantation.
  • Magnetic structure and phase analysis in thin films by Synchrotron Mössbauer Reflectometry (SMR).
  • Oxidation mechanism and kinetics of SiC.

coauthor of 97 scientific papers, cited 790 times (May 2013)

Selected publications

Full list