Thin Film Technology (MBE) Laboratory

Molecular Beam Epitaxy

The MBE system of the Wigner Research Centre has been operational since October 2003. The 13 atom sources are loaded in 2 e-guns and 5 effusion cells for co-evaporation and even complex multilayer sequences without the need of venting the chamber. The UHV system consists of a load-lock, a heat treatment chamber as well as the main deposition chamber. The system handles substrates of up to 2-inch. Prior to the sample preparation, the substrate is cleaned and mounted on a Mo block, then introduced in the UHV through the load-lock, optionally pre-heated then transported to the main chamber for film growth, where it may be rotated for better lateral homogeneity. The layer thickness is monitored by quartz thickness monitors, the surface structure can be samples by RHEED. Residual gas analysis is performed by quadrupole mass spectrometry. The laboratory is capable of growing a very wide selection of (multi)layer systems from below monoatomic layers to layers of about 100 nm thickness of almost any metallic and some compound targets (e.g. MgO). Moreover, a controlled gas source is available for gently flushing the chamber with gases of 10-6 to 10-11 mbar pressures controlled wihin a few per cent. For their significance in applied nuclear physics, two of the simultaneously available 13 atom sources, 57Fe and 62Ni sources have been installed in the growth chamber for isotope-selective multilayer growth, to prepare samples for 57Fe Mössbauer spectroscopy and nuclear resonance scattering or contrast enhancement or contrast matching samples for neutron scattering.

E-Gun 1 materials

E-Gun 2 materials

Effusion cells materials


Si (100)
Si (111)
Si (111) - 3% miscut
MgO (100)
MgO (110)

Further target materials avaible in the laboratory

Co, Cr, Ge, Mn, Nb, Pd, Sc, Si, Ta, Ti, W
Selected publications
  • L.F. Kiss, J. Balogh, L. Bujdosó, D. Kaptás, F. Tanczikó, I. Vincze:
    Temperature dependence of the high-field magnetization in Fe-Ag granular alloys and discontinuous multilayers
    J. Phys. Conf. Ser. 200 (2010) 072050.

  • D.G. Merkel, Sz. Sajti, Cs. Fetzer, M. Major, R. Rüffer, A. Rühm, S. Stankov, F. Tanczikó, L. Bottyán:
    Isotope-periodic multilayer method for short self-diffusion paths – a comparative neutron and synchrotron Mössbauer reflectometric study of FePd alloys
    J. Phys. Conf. Ser. 211 (2010) 012029.

  • Á. Tunyogi, F. Tanczikó, Cs. Bogdán, Z.E. Horváth, E. Szilágyi:
    Characterisation of annealed Fe/Ag bilayers by RBS and XRD
    Surface Science 603 (2009) 3021 - 3023.

  • L.F. Kiss, D. Kaptás, J. Balogh, F. Tanczikó, M. Major, I. Vincze:
    Magnetic properties of Fe–Ag granular alloys
    J. Alloy. Compd. 483 (2009) 620 - 622.

  • A. Kovács, D.G. Merkel, F. Tanczikó, S. Stankov, Y. Hirotsu, L. Bottyán:
    He+ ion irradiation-induced disordering in L10-FePd thin films: Ion fluence dependence
    Scripta Mater. 58 (2008) 635 - 638.

  • D.G. Merkel, F. Tanczikó, S. Sajti, M. Major, A. Németh, L. Bottyán, Z.E. Horváth, J. Waizinger, S. Stankov, A. Kovács:
    Modification of local order in FePd films by low energy He+ irradiation
    J. Appl. Phys. 104 (2008) 013901.

  • Á. Tunyogi, F. Tanczikó, Z. Osváth, F. Pászti:
    Structural characterization of Fe/Ag bilayers by RBS and AFM
    Nucl. Instr. Meth. B 266 (2008) 4916 - 4920.

  • F. Tanczikó, M. Major, D.L. Nagy:
    Molekulanyaláb-epitaxia berendezés az MTA KFKI Részecske- és Magfizikai Kutatóintézetben
    Fizikai Szemle (2007) 78.

  • Á. Tunyogi, F. Pászti, Z. Osváth, F. Tanczikó, M. Major, E. Szilágyi:
    Asymmetric interfaces in Fe/Ag and Ag/Fe bilayers prepared by molecular beam evaporation
    Nucl. Instr. Meth. B 249 (2006) 384 - 386.

  • Address
    Konkoly-Thege M. út 29-33. H-1121 Budapest Hungary

    Mail Address
    P.O.B. 49 H-1525 Budapest Hungary


    (+36-392-2222)-1280 (Gergő Hegedűs), 1192 (Miklós Dolgos)

    The laboratory can primarily be accessed via email contact to the staff, but for experienced users a detailed self-explanatory on-line order form is also available.

    Services and special materials will be charged to the user sample by sample or by including it in the respective project budget. Each user has to have an established project account number to be able to order a sample. New users should negotiate the details with the staff to receive a username, a password and a valid project number.
    One shift of 8 hours service of the laboratory cost 130,000 HUF (425 Euro, yr 2014 figure), which can be halved for smaller jobs. This charge includes also material cost, such as the Si(100) substrate and that of the layer(s) made of ordinary materials. Surcharge applies, however, for expensive single crytal substrates like MgO or sapphire and layers made of Fe-57, Ni-62 enriched stable isotope targets, as well as for layers made of Pt, Pd, Au, and Gd. Please ask for a quotation.
    The list of materials presently available in the laboratory and that of the targets actually located in the MBE chamber are regularly updated on the "Materials" page.

    Separate agreement is necessary for samples to be prepared from materials which are presently not available in the laboratory, if compatible with the capabilities of the MBE facility (UHV-compatibility, evaporation temperature, etc.). The targets are exchanged upon request during the next maintenance, the maintenance period being typically six months.

    Sample ordering

    Sample ordering form

    You can login the ordering form with "user" as the username and "user" as the password.
    If you require personal username and password, please send me an e-mail to the following adress